EQUIPMENT NAME |
STATUS |
COMMENTS |
IN SERVICE DATE |
TOOL GURU
|
CONTACT NUMBER |
RECHG
UNIT
Y/N |
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|
Clean Room Basic Operations |
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E-Beam and Lithography |
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|
Quintel Q 4000-6 NUV Mask Aligner |
|
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Raith 150 E-Beam Lithography System |
|
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Imprio 100
Molecular Imprint Nanoimprint Lithography System |
|
|
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|
Laurell Spin Processor
WS-400B-6NPP-LITE |
|
|
|
Bruce |
7-8180 |
|
Brewer Science
Spin Processor Cee 200 |
|
|
|
Alec
Martin |
7-8142 |
|
Brewer Science Hotplate Cee 1100FX |
|
|
|
Bruce |
7-8180 |
|
GCA DSW |
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VWR Vacuum Oven |
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|
Bruce |
7-8180 |
|
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Material Growth & Etching |
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AJA International ATC 1500-F Ion Mill System |
|
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|
Alec Martin |
7-8142 |
|
AJA International ATC 1800-F Sputter Deposition Tool |
|
|
|
Alec Martin |
7-8142 |
|
IEI ICP Compound Semiconductor Etch System |
|
|
|
|
|
|
STS ICP Deep Silicon Etch System |
|
Fully Qualified |
|
Alec Martin |
7-8142 |
|
STS ICP Dielectric Etch System |
|
Fully Qualified and Operational |
|
Alec Martin |
7-8142 |
|
STS ICP III-V Etch System |
|
|
|
Alec Martin |
7-8142 |
|
STS PECVD System |
|
Fully Qualified and Operational |
|
Alec Martin |
7-8142 |
|
Kurt Lesker PVD75 Evaporator |
|
Power Suppy Inoperable, Vendor on Site |
|
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MOCVD |
|
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Microautomation Wafer Saw |
|
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|
Bruce |
7-8180 |
|
Supercritical Drying Station |
|
|
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|
Omicron STM/AFM System |
|
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SSI Solaris 150 Rapid Thermal Process System |
|
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Trion RIE System |
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Unaxis ICP III-V |
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Optoelectronic Fabrication and Packaging |
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| |
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LCD-100 Scriber&Breaker |
|
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|
Oleg Smolski |
7-8288 |
|
Finetech Lambda
Flip-Chip Die Bonder |
|
|
|
|
7-8288 |
|
K&S 4524AD
Wire Bonder |
|
|
|
|
7-8288 |
|
| |
|
|
|
|
|
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Metrology |
|
|
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Tencor Instruments Alpha-step 200 Surface Profi |
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X-Ray Interferometer |
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Zygo 4” Interferometer |
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Veeco General Purpose Phoase Shifting Interferometer |
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Fisba-Optik Micro Interferometer |
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Canon Microscope 1 |
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|
Bruce |
7-8180 |
|
Canon Microscope 2 |
|
|
|
Bruce |
7-8180 |
|
Nanospec AFT |
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|
Alec
Martin |
7-8142 |
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Imaging & Characterization |
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JEOL JSM-646LV Scanning Electron Microscope |
|
Operational...
but the backscatter detector is out of service |
|
Alec
Martin |
7-8142 |
|
Veeco Nanoscope IV AFM |
|
|
|
|
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|
Woolam WVASE32 Spectrascopic Ellipsometer |
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Z-scan Apparatus |
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Nano Alignment Systems |
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Veeco Nanoscope IV SPM Control Station |
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Tektronix Semiconductor Parameter Tester |
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STN Probe Station |
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Cathodoluminesence |
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EDAX |
|
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|
Alec
Martin |
7-8142 |
|
Deep Level Transient Spectroscopy |
|
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Spectrometers & Microscopes |
|
|
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|
Cambridge SEM |
|
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|
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|
Panalytical Xray Diffractometer (XRD) |
|
Aligned and Operational.
Users need to complete safety paperwork available from Scott Williams and apply for film badges prior to use. |
|
Alec Martin |
7-8142 |
|
|
|
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Networking & Fiber Optics |
|
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Fujikura Fusion Splicer |
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Movaz DWDM |
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Optellios Fusion Splicer |
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Agilent Optical Spectrum Analyzer |
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Luna Optical Backscatter Reflectometer |
|
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Optotek Tunable Laser System Telecom Camera |
|
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Melles Griot Bookends with Internal Piezos |
|
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End & Edge Polishing System |
|
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Optellios Motion Controller Plus |
|
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Fiber Lensing Polishing System |
|
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Burleigh Photonics Alignment System |
|
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Luna Benchtop Optical Vector Analyzer |
|
|
|
|
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Agilent All Parameter Test Station 81910A |
|
|
|
|
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Newport Ultra Short Laser Pulse Measurement S |
|
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|
|
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Tektronix Oscilloscopes |
|
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EXFO Optical Time Domain Reflectometer |
|
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Exera Fiber Splicing Kit Heat Oven |
|
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Laser Facility |
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Femtosecond Laser System – 250 KHz Amplifier |
|
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Femtosecond Laser System – 1KHz Amplifier Sy |
|
|
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Fiber Laser Modules |
|
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|
|
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|
Continuum Pulsed Q-Switched Nd Yag Laser |
|
|
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|
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|
Research Grade Optical Tables |
|
|
|
|
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|
Excel Yag Laser Opotic System |
|
|
|
|
|
|
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Simulation & Modeling |
|
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|
EM Premier Workstation |
|
|
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|
Rsoft |
|
|
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|
FemLabs |
|
|
|
|
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|
Full Wave |
|
|
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|
FDTD |
|
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